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MLR35 (CF40, 2.75in OD) MagiLift Series Combined Magnetically Coupled Rotary and Linear Motion Feedthrough

Magnetically-coupled rotation and axial motion in a single, compact device. An example application would be the rotation of a substrate cradle with the lift and lower motion used to facilitate sample transfer. Hollow drive technology allows services to be passed through to a substrate heating module.

Overview
Actuation Options

Overview

The MLR35 is a magnetically-coupled combined hollow rotary and linear motion device, which enables a central hollow shaft to be rotated in UHV at up to 60 rpm and moved axially by up to 25mm. As such this manipulator is ideal for applications where, for example, a substrate may need to be rotated in front of a source or heater to achieve uniformity whilst being able to move the substrate axially to facilitate sample hand off.

The MRL35 is magnetically-coupled (i.e. free from bellows, sliding seals, Ferro seals etc) ensuring trouble-free operation and eliminating the risk of leaks in service. The very high torque and axial thrust provided by our highly optimized magnetic couplings ensure precision and surety of motion.

Features:

True UHV performance
Magnetically-coupled fail-safe design
60rpm maximum rotation speed and 25mm axial motion in a single, compact device
No bellows or dynamic seals
Bakeable to 250Â°C with motors removed
Zero-backlash under low load
Multiple methods of motorization/actuation

MAGILIFT - Compact Substrate Rotation with 25mm lift/lower

Magnetically-coupled hollow rotary drive with 27.8mm clear bore and integrated lift/lower mechanism

Actuation Options

Lift Actuation Option

Code	Actuation Method	Description
H	Manual handwheel actuation	Manual handwheel actuation for lift/lower - rotation separately controlled as explained below.
P	Pneumatically actuated	Large bore Linear Shift Mechanisms are fitted with a geared handwheel to provide sufficient mechanical advantage to overcome the additional thrust due to vacuum.

Rotation Actuation Option

Code	Actuation Method	Description
SS	Stepper motor	Stepper motor actuated rotation. Typically chosen when precision location feedback is required. Controller sold separately.
SM	SMART motor	SMART motor actuated rotation. Animatics smart motor with integrated controls.

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