EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10

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EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 1

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 2

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 3

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 4

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10

Features

Small Air-Cooling Pump
No-Contact Design
High Pumping Speeds at Atmosphere
Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
UL, CE, and NRTL rated
Single and Three Phase Versions Available

Applications

Load Locks
Analytical Instruments (LCMS, ICPMS)
Electron Microscopes
PVD Systems
Oxygen Plasma Systems

Charts

Specifications Table

Pump Model	EV-A03	EV-A06	EV-A10
Pumping Speeds	50 (Hz) 8.83 CFM 15.0 m³/hr 60 (Hz) 9.00 CFM 15.3 m³/hr	50 (Hz) 21.2 CFM 36.0 m³/hr 60 (Hz) 21.0 CFM 35.7 m³/hr	50 (Hz) 35.3 CFM 60.0 m³/hr 60 (Hz) 35.0 CFM 59.5 m³/hr
Max Water Vapor Pumping Rate (with gas ballast)	250 g/hr	350 g/hr	500 g/hr
Ultimate Pressure	Total With Gas Ballast 1.00 x 10^-1 mbar 7.50 x 10^-2 Torr Total Without Gas Ballast 1.00 x 10^-2 mbar 7.50 x 10^-3 Torr	Total With Gas Ballast 1.00 x 10^-1 mbar 7.50 x 10^-2 Torr Total Without Gas Ballast 1.00 x 10^-2 mbar 7.50 x 10^-3 Torr	Total With Gas Ballast 3.00 x 10^-2 mbar 2.25 x 10^-2 Torr Total Without Gas Ballast 1.00 x 10^-2 mbar 7.50 x 10^-3 Torr
Cooling Method(s)	Method Convection	Method Convection	Method Convection
Inlet Flange	KF25	KF40	KF40
Exhaust Flange	KF25	KF25	KF25
Series	Standard	Standard	Standard
Weight Lbs (kg)	51.0 ( 23.0 )	119 ( 54.0 )	165 ( 75.0 )
Dimensions in. (mm.) (W/D/H)	8.27 x 15.2 x 9.84 (210 x 385 x 250 )	11.7 x 18.5 x 10.8 (298 x 470 x 275 )	12.5 x 21.4 x 23.7 (317 x 544 x 603 )
Lubrication Type	Dry	Dry	Dry
Technology Type	Multi-Stage Roots	Multi-Stage Roots	Multi-Stage Roots

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Note:

Power cable included with pumps.

Ordering Table

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Pump Model	Inlet Flange	Voltage & Phases	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Voltage & Phases	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
EV-A03	KF25	100-115V 50/60 Hz, 1- Ø		EBARA EV-A03 Multi-Stage Roots Pump, KF25 Inlet Flange, 15 m^3/hr at 50Hz / 9 CFM at 60Hz, Convection Cooling, 100-115VAC 50/60 Hz, 1- Ø, Mains Cable Not Included	202507	$8,100.00
EV-A06	KF40	100-115V 50/60 Hz, 1- Ø		EBARA EV-A06 Multi-Stage Roots Pump, KF40 Inlet Flange, 36 m^3/hr at 50Hz / 21 CFM at 60Hz, Convection Cooling, 100-115VAC 50/60 Hz, 1- Ø, Mains Cable Not Included	202508	$10,250.00
EV-A03	KF25	200-240V 50/60 Hz, 1- Ø		EBARA EV-A03 Multi-Stage Roots Pump, KF25 Inlet Flange, 15 m^3/hr at 50Hz / 9 CFM at 60Hz, Convection Cooling, 200-240V 50/60 Hz, 1- Ø, Mains Cable Not Included	202549	$8,100.00
EV-A06	KF40	200-240V 50/60 Hz, 1- Ø		EBARA EV-A06 Multi-Stage Roots Pump, KF40 Inlet Flange, 36 m^3/hr at 50Hz / 21 CFM at 60Hz, Convection Cooling, 200-240V 50/60 Hz, 1- Ø, Mains Cable Not Included	202550	$10,250.00
EV-A03	KF25	200-240V 50/60 Hz, 3- Ø		EBARA EV-A03 Multi-Stage Roots Pump, KF25 Inlet Flange, 15 m^3/hr at 50Hz / 9 CFM at 60Hz, Convection Cooling, 200-240V 50/60 Hz, 3- Ø, Mains Cable Not Included	202552	$8,100.00
EV-A06	KF40	200-240V 50/60 Hz, 3- Ø		EBARA EV-A06 Multi-Stage Roots Pump, KF40 Inlet Flange, 36 m^3/hr at 50Hz / 21 CFM at 60Hz, Convection Cooling, 200-240V 50/60 Hz, 3- Ø, Mains Cable Not Included	202553	$10,250.00
EV-A10	KF40	200-240V 50/60 Hz, 3- Ø		EBARA EV-A10 Multi-Stage Roots Pump, KF40 Inlet Flange, 60 m^3/hr at 50Hz / 35 CFM at 60Hz, Convection Cooling, 200-240V 50/60 Hz, 3- Ø, Mains Cable Not Included	202603	$12,400.00
EV-A10	KF40	200-240V 50/60 Hz, 1- Ø		EBARA EV-A10 Multi-Stage Roots Pump, KF40 Inlet Flange, 60 m^3/hr at 50Hz / 35 CFM at 60Hz, Convection Cooling, 200-240V 50/60 Hz, 1- Ø, Mains Cable Not Included	202604	$12,400.00

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