Rechargeable Baffled Boxes

Overview

Excellent thermal sources for depositing thin film of silicon monoxide.

How they work

• The box is loaded with SiO before use (not exceeding the weight indicated for that box)
• Bulk SiO is held in compartment(s) indirectly connected to the chimney
• As the box is heated, the SiO vapor is forced to flow through a series of baffles before exiting at the chimney
• Since there is no line of sight between the bulk material and the substrate surface, the deleterious effects of spitting or streaming on the depositing film are eliminated

Additional information

• Available in non-rechargeable and rechargeable—named to reflect the location of the initial charging or recharging
• A rechargeable box can be filled through one or two lids while still mounted on its electrical feedthroughs in the vacuum chamber
• A non-rechargeable box must be dismounted from its electrical feedthroughs and disassembled before charging or re-charging
• Both styles offer long life and can be recharged many times
• Designed with two evaporation plume directions—upward "vertical" or downward "inverted" (by turning either source on its side, a "horizontal" plume can be arranged)