AXXIS

Thin Film Deposition System Platform

AXXIS
Co-Sputtering, Thermal Evaporation, & Electron Beam Techniques

AXXIS™ - Facilitates multiple deposition techniques and co-deposited films efficiently!

The University of Alberta uses our AXXIS for glancing angle depositions (GLAD).

Features

18" diameter x 15" deep cylindrical 304 stainless steel chamber
Six radial process ports
Hinged front-loading door
Door- or port-mounted substrate fixtures
Turbomolecular or cryogenic pumping
Available with up to six TORUS^® circular magnetron sputtering sources
Available with up to 6-pocket 5.5kW electron beam source
Available with up to three thermal evaporation sources
Optional ion source
Open framework
Instrument rack

Typical Applications

R&D Thin Film Deposition

Optional

Substrate fixture indexing and rotation
Load lock
Computer-controlled process automation

Process Options

Heating
Cooling
Bias
Ion Source for Substrate Cleaning/Assisted Deposition

AXXIS Thin Film Deposition System Platform

AXXIS Thin Film Deposition System Platform 1

AXXIS Thin Film Deposition System Platform 2

AXXIS Thin Film Deposition System Platform 3

Architecture Overview

Kurt J. Lesker Company^® eKLipse™ Controls Software is utilized on all KJLC platforms. The eKLipse™ controls platform utilizes a .NET application running on a Windows PC for its User Interface and Recipe Editor. Equipment automation is accomplished via a standalone Real Time Controller.

Recipes

Graphical Recipe Builder – Easily create recipes by clicking on the desired component and set that item's attributes
Scripted Recipe Builder – A more traditional "scripted" recipe editor exposes more details for setting or checking the value of any system component during a process.

Reliable

Real Time Controller – The system operates independently of the Windows software package and will continue the recipe should the software / computer malfunction.
Independent Thermal Evaporation Thin Film Control – There is no third party software requiring a "handshake" or "handoff" between the Systems Manufacturers software and the thin film controller's software.

Unlimited Recipes, (import/export capable)

Unlimited recipes with user security level features
Recipe import/export capability (for transferring recipes between similarly equipped tools)
Any recipe step can be configured to allow the user to alter a value, enabling process condition changes, without affecting the master recipe. As an example, at the time of execution, the recipe can prompt the user for the desired deposition thickness, or power setting.
Consistent User experience across all deposition techniques and KJLC platforms (Sputter, Thermal, EBeam, ALD)
Multi chamber and multi PC control for cluster tools

Custom Chart Recorder and Datalogging

Custom Chart with up to 10 simultaneous plots
Chart Recorder can be used to display any setpoint or feedback parameter
Automatic datalogging of each recipe step for all recipes
Chart data and configuration can be saved
Graphical selection of signals to be recorded

Custom Maintenance Counters

Custom Maintenance Counters are available for each component
Periodic Maintenance interlocks and recipe checks can be configured for any maintenance counter
Sputter Target kiloWatt*Hour and custom material usage tracking

User Security

Supports multiple user accounts and password levels with custom security access for recipes and screens
Software screen access can be customized per user
Recipe editing and manual operation features can be assigned on a per user basis;
Users with full access have the ability to edit recipes and control interlocks. Restricted access users will be limited to running certain recipes and have no control over interlocks.
Every control object can be assigned to a standard user security level.
Individual screen access can be separately assigned to any user.

Multi User Facility Features

System event log captures all user login/logout events, all recipes executed, and system status messages
Interlocking of vacuum and deposition equipment provides continuous system status monitoring while restricting unapproved system usage (no need to 'power off' system screen or PC)

Remote Support Utility and Apps

Customized Version of TeamViewer allows remote support (free Android and IOS apps)
Remote connection supports system monitoring/control and file transfer

Helpful Material Resources

Evaporation Materials & Sputter Targets Tech Notes

Material Deposition Chart

Protocol for Cleaning Materials Packaged in Oil

Ramp Procedure for Ceramic Target Break-In

Deposition Materials FAQ

Materials Calculators

Materials Overview

Our Materials Division stocks a vast assortment of high purity materials, evaporation sources, and crucible liners for use in both thermal and E-beam evaporation as well as sputter deposition processes. We offer pure elements, compounds, alloys, ceramics, intermetallics, and mixtures in a variety of shapes, sizes, and purities for both R&D and Production applications. Each sputtering target and evaporation material ships complete with a Certificate of Analysis and SDS. We also provide in-house sputter target bonding and precious metals reclamation services, saving you both time and money.

Sputter Targets

We manufacture a wide range of target materials designed to meet the demanding needs of both Production customers as well R&D customers needing a custom one off target. We are able to offer various purities, materials, sizes, and compositions. Our experienced in house bonding team is also able to provide high quality bonding services using KJLC or customer supplied backing plates. Many standard sizes and configurations available to ship directly from stock.

Evaporation Materials

KJLC stocks a wide variety of evaporation materials in various sizes, shapes and quantities, available for immediate shipment. The range of materials offered is extensive, including pure metals, precious metals, standard alloys, oxides, nitrides, and fluorides. The materials can be packaged for the small quantity user, as well as, for the large volume production customer.

Precious Metals

Our unique offering of precious metal products protects our customers from daily market price fluctuations by locking in the price on the day the order is placed. Inventory management tools allow us to stock a variety of precious metal products in standard target configurations, as well as, pellet, shot, and wire for evaporation. Shipments are packaged per order in the quantities our customers require, allowing them to purchase as much or as little as they need. Because of the high value of these materials we offer a convenient reclaim service for precious metal scrap. Credit is applied quickly to customer accounts which can be used to fund their next purchase. Kurt J. Lesker Company understands that these high cost materials require tight controls and close management. Our goal is to make precious metal purchases as easy as possible for our customers.

Thermal Sources

As a complement to the extensive offering of evaporation materials, a wide range of thermal evaporation sources are available to our customers. Hundreds of boat sources with differing geometries and capacities make it easy to find a source that is ideally suited to coat numerous materials onto substrates of various configurations. Many materials prove troublesome for evaporation and may require a different style of evaporation source. In addition to boat sources, alternative sources such as filaments, baskets, box heaters, and heaters with crucibles may be the solution to evaporating these more difficult materials. A wide range of products are available to ship from stock with evaporation materials or as replacements.

Quality

At the Kurt J. Lesker Company quality is our highest priority. Our ISO 9001:2015 certification ensures that product quality is never compromised. All of our products undergo the requisite level of quality control inspection and all materials are shipped with a certificate of analysis and material safety data sheet. We employ numerous analytical techniques at various stages in the process to ensure that the products meet our quality standards and perform in the demanding applications which they are used.

Technical Support

As a leading manufacturer of PVD equipment, we have quite a few technical resources within the organization. We are happy to help troubleshoot or offer advice on process related questions ranging from sputtering powers to crucible selection.

Global KJLC Systems Service and Support

The Process Equipment Division™ (PED) Global Service Department consists of dedicated, experienced personnel who strive to provide world class customer service.

North America, South America, & Australia
Phone: +1 412 387 9128
Fax: +1 412 233 4275
E-mail: NAservice@lesker.com

Europe, Middle East, India, & Africa
Phone: +44 1424 458100
Fax: +44 1424 458103
E-mail: EMEIAservice@lesker.com

Asia
Phone: +86 21 50115900
Fax: +86 21 50115863
E-mail: ASIAservice@lesker.com

For other regions please e-mail: NAservice@lesker.com

AXXISCo-Sputtering, Thermal Evaporation, & Electron Beam Techniques