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HV Pneumatic Bellows Sealed SS Angle Valves (CF Flanged Fluorocarbon Bonnet Seal)
Reliable, economical, general-purpose components for HV and UHV applications requiring cleanliness and corrosion resistance.
In the open position
- Edge-welded bellows and valve seat move out of the gas path thereby achieving high conductance.
- Can withstand intermittent baking to 80°C.
- For high temperature bake-out, please use metal bonnet seal valves.
Features
- Feature fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals.
- Normal repairs can be made without removing the valve body from the system.
Specifications Table
| Manufacturer | KJLC |
|---|---|
| Pressure |
Torr 7.52 x 10-9 Torr mbar 1.00 x 10-8 mbar |
| Rates |
Leak Rate 2.00 x 10-9 mbar*L/s 1.50 x 10-9 Torr*L/s |
| Temperature |
Actuator 80.0 ºC 176 ºF Closed Bake 150 ºC 302 ºF Open Bake 150 ºC 302 ºF |
|
Cycle Life |
500,000 |
|
Actuator Type |
Pneumatic Single Acting
|
|
Valve Body Material |
304L SS
|
|
Poppet Material |
Fluorocarbon (FKM)
|
|
Shaft Seal |
Welded Bellows
|
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Ordering Table
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